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[Dataset:Wafer/Metal Etch Data ] [Thesis] Generalized Feature Extraction for Structural Pattern Recognition in Time-Series Data
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  • 2023-01-13

 

[Thesis] Generalized Feature Extraction for Structural Pattern Recognition in Time-Series Data 

 

​Source : Bobski's World (cmu.edu)

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  • Wafer Database
  • The wafer database comprises a collection of time-series data sets where each file contains the sequence of measurements recorded by one vacuum-chamber sensor during the etch process applied to one silicon wafer during the manufacture of semiconductor microelectronics. Each wafer has an assigned classification of normal or abnormal. The abnormal wafers are representative of a range of problems commonly encountered during semiconductor manufacturing.

     

  • Metal Etch Data (eigenvector.com)
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    다음글 [남기전 박사, J. Water Proc Eng/JCR10%] Multiagent 강화학습기반 하수처리장 자율제어/자율운전 (MARL-based Autonomous Control)